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Hexachlorodisilane 99% min. | 13465-77-5

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Hexachlorodisilane 99% min. | 13465-77-5

Hexachlorodisilane 99% min. | 13465-77-5 - S2121

IUPAC Name Hexachlorodisilane
CAS # 13465-77-5
Product # S2121
Molecular Formula Cl6Si2
Molecular Weight 268.89
Melting Point 144-145.5 °C
EINECS 233-042-5
Typically used in the semiconductor industry.

Abbreviation: HCDS

HCDS is used to grow thin films of Si, SiO2, SiC by chemical vapor deposition. HCDS can be used at relatively low temperature.

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